Liwei LI~(*a),Rong ZHU~b,Zhaoying ZHOU~b,Jianxing REN~a a Energy Sources and Environment Engineering,Shanghai University of Electric Power,Shanghai 200090,China b Dept.of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China
Coupled analysis on the micro-airflow and its actuator for MEMS fluidic devices
[M].2008 International Conference on Optical Instruments and Technology,
暂无评论